Determination of Metallic Impurities in a Silicon Wafer by...

Analytical Sciences 2003 Vol. 19; Iss. 7

Determination of Metallic Impurities in a Silicon Wafer by Local Etching and Electrothermal Atomic Absorption Spectrometry

CHUNG, Hye-Young, LEE, Sang-Hak, KIM, Young-Hun, LEE, Ki-Sang, KIM, Dae-Hong
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Volume:
19
Year:
2003
Language:
english
Journal:
Analytical Sciences
DOI:
10.2116/analsci.19.1051
File:
PDF, 117 KB
english, 2003
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