FTIR-ATR Evaluation of Organic Contaminant Cleaning Methods for SiO2 Surfaces
SHINOZAKI, Akihito, ARIMA, Kenta, MORITA, Mizuho, KOJIMA, Isao, AZUMA, YasushiVolume:
19
Year:
2003
Language:
english
Journal:
Analytical Sciences
DOI:
10.2116/analsci.19.1557
File:
PDF, 50 KB
english, 2003