Effects of Electron Back-scattering in Observations of...

Analytical Sciences 2010 Vol. 26; Iss. 2

Effects of Electron Back-scattering in Observations of Cross-sectioned GaAs/AlAs Superlattice with Auger Electron Spectroscopy

SUZUKI, Mineharu, URUSHIHARA, Nobuaki, SANADA, Noriaki, PAUL, Dennis F., BRYAN, Scott, HAMMOND, John S.
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Volume:
26
Year:
2010
Language:
english
Journal:
Analytical Sciences
DOI:
10.2116/analsci.26.203
File:
PDF, 1.80 MB
english, 2010
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