Low-temperature plasma ashing of high-carbon materials

Low-temperature plasma ashing of high-carbon materials

MIZUNO, Kingo, YOKOGAWA, Kiyoshi, YASUDA, Noriko, HOZUMI, Keiichiro
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Volume:
23
Year:
1974
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.23.1010
File:
PDF, 829 KB
1974
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