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Determination of impurities in silicon nitride by particle induced X-ray emission analysis.
MIYAGAWA, Yoshiko, SAITO, Kazuo, NIWA, Hiroaki, ISHIZUKA, Toshio, MIYAGAWA, SojiVolume:
34
Year:
1985
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.34.12_766
File:
PDF, 668 KB
1985