SIMS analysis of joining interface between silicon nitride...

BUNSEKI KAGAKU 1989 Vol. 38; Iss. 10

SIMS analysis of joining interface between silicon nitride and metal.

SHICHI, Yushi, MATSUKIYO, Kenzi, MATSUNAGA, Masazi
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Volume:
38
Year:
1989
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.38.10_505
File:
PDF, 863 KB
1989
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