Determination of ultra-trace copper on silicon wafer by neutron activation analysis.
YONEZAWA, Hiroki, SHIKANO, Koji, SHIGEMATSU, ToshioVolume:
42
Year:
1993
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.42.4_229
File:
PDF, 739 KB
1993