Microarea elemental mapping using gallium focused ion beam-induced Auger electrons.
CHENG, Zhaohui, SAKAMOTO, Tetsuo, TAKAHASHI, Masanori, KURAMOTO, Yasuyuki, OWARI, Masanori, NIHEI, YoshimasaVolume:
47
Year:
1998
Language:
english
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.47.321
File:
PDF, 3.24 MB
english, 1998