Determination of ultratrace metallic impurities in metal-oxide thin films for ferroelectric random-access memories by precipitation separation/ICP-MS and ETAAS
YABUKI, MotonakaVolume:
52
Year:
2003
Journal:
BUNSEKI KAGAKU
DOI:
10.2116/bunsekikagaku.52.447
File:
PDF, 294 KB
2003