Creep of vaporization-deposited copper films

Journal of Applied Mechanics and Technical Physics 1971 / 05-06 Vol. 12; Iss. 3

Creep of vaporization-deposited copper films

K. K. Ziling, V. Yu. Pchelkin
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Volume:
12
Language:
english
Pages:
3
DOI:
10.1007/bf00851630
Date:
May, 1971
File:
PDF, 205 KB
english, 1971
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