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Atomic Layer Deposited Protective Layers
Leskela, Markku, Salmi, Emma, Ritala, MikkoVolume:
879
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.879.1086
Date:
November, 2016
File:
PDF, 214 KB
english, 2016