Numerical Study on the Dependence of Surface Topography with Sputter Etching Process
Li, Kun-Dar, Chang, Tsung-Lung, Huang, Po-Yu, Dong, Yu-WeiVolume:
16
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2016.12915
Date:
September, 2016
File:
PDF, 3.27 MB
english, 2016