The Suggestion of Droplets Generation Prevention Method of...

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 2013 Vol. 79; Iss. 807

The Suggestion of Droplets Generation Prevention Method of CNx Coating by Ion Beam Assisted Deposition

YAGI, Yuji, TOKOROYAMA, Takayuki, KOUSAKA, Hiroyuki, UMEHARA, Noritsugu, FUWA, Yoshio, MANABE, Kazuyoshi
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Volume:
79
Year:
2013
Language:
english
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
DOI:
10.1299/kikaic.79.4443
File:
PDF, 3.86 MB
english, 2013
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