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Determination of trace amounts of phosphorus in high-purity silicon by ICP-MS after acid-vapor decomposition under elevated pressure and isolation as a molybdophosphate-dodecyltrimethylammonium bromide ion pair.
FUJIMOTO, Kyoko, ITO, Masao, SHIMURA, Makoto, YOSHIOKA, KeiichiVolume:
47
Year:
1998
Journal:
Bunseki kagaku
DOI:
10.2116/bunsekikagaku.47.187
File:
PDF, 2.57 MB
1998