Effect of an optical emission spectrometer feedback-controlled method on the characterizations of nc-TiC/a-C:H coated by high power impulse magnetron sputtering
Jiang, Xiurong, Yang, Fu-Chi, Lee, Jyh-Wei, Chang, Chi-LungVolume:
73
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2016.11.007
Date:
March, 2017
File:
PDF, 1.27 MB
english, 2017