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Novel Vertical 3D Structure of TaOx-based RRAM with Self-localized Switching Region by Sidewall Electrode Oxidation
Yu, Muxi, Cai, Yimao, Wang, Zongwei, Fang, Yichen, Liu, Yefan, Yu, Zhizhen, Pan, Yue, Zhang, Zhenxing, Tan, Jing, Yang, Xue, Li, Ming, Huang, RuVolume:
6
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep21020
Date:
February, 2016
File:
PDF, 2.16 MB
english, 2016