[IEEE 2016 IEEE International Conference on Plasma Science (ICOPS) - Banff, AB, Canada (2016.6.19-2016.6.23)] 2016 IEEE International Conference on Plasma Science (ICOPS) - Plasma enhanced atomic layer deposition and laser plasma deposition of ultra-thin ZnO films for Schottky barrier devices
Shen, Mei, Muneshwar, Triratna P., Cadien, Ken, Tsui, Ying Y., Barlage, Doug, Muneshwar, Triratna P., Cadien, KenYear:
2016
Language:
english
DOI:
10.1109/plasma.2016.7534230
File:
PDF, 127 KB
english, 2016