Effect of a radiation shield on melt/crystal interface shape and pull rate of silicon CZ puller.
TSUKADA, TAKAO, IMAISHI, NOBUYUKI, HOZAWA, MITSUNORIVolume:
21
Year:
1988
Language:
english
Journal:
Journal of Chemical Engineering of Japan
DOI:
10.1252/jcej.21.381
File:
PDF, 524 KB
english, 1988