Preparation of silicon thin diapharagms free from...

Preparation of silicon thin diapharagms free from micropyramids using anisotropic etching in KOH solutions.

Matsuoka, Masakuni, Yoshida, Yuko, Moronuki, Masaki
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Volume:
25
Year:
1992
Journal:
JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
DOI:
10.1252/jcej.25.735
File:
PDF, 5.27 MB
1992
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