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Gas-Phase Reaction Rate During ZrO2 Thin-Film Formation by LPMOCVD. Comparison of growth rate distributions obtained theoretically and experimentally.
Akiyama, Yasunobu, Nakano, Katsuyuki, Sato, Tsuneyuki, Imaishi, NobuyukiVolume:
18
Year:
1992
Journal:
KAGAKU KOGAKU RONBUNSHU
DOI:
10.1252/kakoronbunshu.18.840
File:
PDF, 3.24 MB
1992