Synthesis of AlN Fine Particles by Surface Corona...

KAGAKU KOGAKU RONBUNSHU 1994 Vol. 20; Iss. 5

Synthesis of AlN Fine Particles by Surface Corona Discharge-CVD.

Ohyama, Yasushi, Chiba, Shigeo, Harima, Kazuyuki, Kondo, Kazuo, Shinohara, Kunio
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Volume:
20
Year:
1994
Journal:
KAGAKU KOGAKU RONBUNSHU
DOI:
10.1252/kakoronbunshu.20.642
File:
PDF, 2.44 MB
1994
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