Coating of Si3N4 Fine Particles with AlN by Fludizied...

KAGAKU KOGAKU RONBUNSHU 1996 Vol. 22; Iss. 2

Coating of Si3N4 Fine Particles with AlN by Fludizied Bed-CVD.

Chiba, Shigeo, Ohyama, Yasushi, Harima, Kazuyuki, Kondo, Kazuo, Shinohara, Kunio
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Volume:
22
Year:
1996
Journal:
KAGAKU KOGAKU RONBUNSHU
DOI:
10.1252/kakoronbunshu.22.412
File:
PDF, 545 KB
1996
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