Fabrication characteristics of a line-and-space pattern and a dot pattern on a roll mold by using electron-beam lithography
OJIMA, Kai, SAITO, Masashi, UNNO, Noriyuki, TANIGUCHI, JunVolume:
10
Year:
2016
Language:
english
Journal:
Journal of Advanced Mechanical Design, Systems, and Manufacturing
DOI:
10.1299/jamdsm.2016jamdsm0074
File:
PDF, 2.48 MB
english, 2016