Study of Finishing of Wafers by Magnetic Field-Assisted Finishing
YAMAGUCHI, Hitomi, YUMOTO, Kazuki, SHINMURA, Takeo, OKAZAKI, TakahikoVolume:
3
Year:
2009
Language:
english
Journal:
Journal of Advanced Mechanical Design, Systems, and Manufacturing
DOI:
10.1299/jamdsm.3.35
File:
PDF, 1.34 MB
english, 2009