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Calibration of Wet Etching Parameters for Sacrifice Layer of MEMS
TAKANO, Naoki, SATO, Kenichi, TORIYAMA, Toshiyuki, YAMASAKI, Toru, UESUGI, SeiichiVolume:
5
Year:
2011
Language:
english
Journal:
Journal of Computational Science and Technology
DOI:
10.1299/jcst.5.106
File:
PDF, 1.33 MB
english, 2011