MD Simulation of Hardness Property of Al Thin Film...

JSME International Journal Series A 2001 Vol. 44; Iss. 3

MD Simulation of Hardness Property of Al Thin Film Sputtered on Si Substrate and Its Related to Porosity.

IIZUKA, Takashi, ONODA, Akira, HOSHIDE, Toshihiko
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Volume:
44
Year:
2001
Journal:
JSME International Journal Series A
DOI:
10.1299/jsmea.44.346
File:
PDF, 1.19 MB
2001
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