Effective Transmission of High Frequency Ultrasound into a Silicon Chip through a Polymer Layer
TOHMYOH, Hironori, SAKA, MasumiVolume:
47
Year:
2004
Language:
english
Journal:
JSME International Journal Series A
DOI:
10.1299/jsmea.47.287
File:
PDF, 1.36 MB
english, 2004