Growth kinetics of low-temperature oxide films on silicon

Journal of Engineering Physics and Thermophysics 1974 / 10 Vol. 27; Iss. 4

Growth kinetics of low-temperature oxide films on silicon

L. I. Gurskii, V. M. Koleshko, B. S. Reznikov, I. V. Nekaryukin, A. A. Kovalevskii
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Volume:
27
Language:
english
Pages:
3
DOI:
10.1007/bf00864033
Date:
October, 1974
File:
PDF, 198 KB
english, 1974
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