Approach for Measuring Elastic Modulus of Thin Film by Scanning Acoustic Microscope.
Todoroki, Akira, Kobayashi, Hideo, Nakamura, Haruo, Park, Wigon, Arai, Yoshio, Iida, HidenoriVolume:
59
Year:
1993
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.59.2977
File:
PDF, 730 KB
1993