Stress Evaluation of Si Single Crystal with Laser Raman Spectroscopy.
IKEBE, Tomo, NIITSU, Yasushi, SUZUKI, Eiichi, IKEDA, Teruki, OHKUBO, YuseiVolume:
65
Year:
1999
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.65.2157
File:
PDF, 699 KB
1999