Fabrication of Smart Material PZT thin Films by RF...

Fabrication of Smart Material PZT thin Films by RF Magnetron Sputtering, Method in Micro Actuators

TSUCHIYA, Kazuyoshi, KITAGAWA, Toshiaki, UETSUJI, Yasutomo, NAKAMACHI, Eiji
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Volume:
71
Year:
2005
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.71.66
File:
PDF, 9.97 MB
2005
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