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Fabrication of Smart Material PZT thin Films by RF Magnetron Sputtering, Method in Micro Actuators
TSUCHIYA, Kazuyoshi, KITAGAWA, Toshiaki, UETSUJI, Yasutomo, NAKAMACHI, EijiVolume:
71
Year:
2005
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.71.66
File:
PDF, 9.97 MB
2005