Young's Modulus Measurement of Thin Films for Electronic...

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A 2011 Vol. 77; Iss. 773

Young's Modulus Measurement of Thin Films for Electronic Devices by Precision 3-Points Bending Method

ZHANG, Shengde, ANDO, Takeshi, YUAN, Zhipan, KOBAYASHI, Kaoru, TERADA, Kenji, SAKANE, Masao
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Volume:
77
Year:
2011
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
DOI:
10.1299/kikaia.77.190
File:
PDF, 1.53 MB
2011
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