Effects of Argon Pressure and Bias Voltage on c-axis...

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A 2013 Vol. 79; Iss. 802

Effects of Argon Pressure and Bias Voltage on c-axis Lattice Crystal Constants of Sputtered Niobium Sulfide Films

SASAKI, Iwao, MATSUZAKI, Kazunari, NAKANO, Shingo, IKEDA, Michiaki, MATSUDA, Kenji
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Volume:
79
Year:
2013
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
DOI:
10.1299/kikaia.79.779
File:
PDF, 563 KB
2013
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