Extension of the Chemical Reaction Scheme in DSMC Method...

Extension of the Chemical Reaction Scheme in DSMC Method and Application to the LPCVD Processes.

SAKIYAMA, Yukinori, TAKAGI, Shu, MATSUMOTO, Yoichiro
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Volume:
68
Year:
2002
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.68.689
File:
PDF, 751 KB
2002
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