![](/img/cover-not-exists.png)
Extension of the Chemical Reaction Scheme in DSMC Method and Application to the LPCVD Processes.
SAKIYAMA, Yukinori, TAKAGI, Shu, MATSUMOTO, YoichiroVolume:
68
Year:
2002
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.68.689
File:
PDF, 751 KB
2002