Wafer transfer system for LSI production.
SAKANO, Susumu, ASAKAWA, Makoto, KURODA, Hisao, TAKEDA, YujiVolume:
52
Year:
1986
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.52.412
File:
PDF, 625 KB
1986