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Microstep X-Y-.THETA. Table Using Three-Pole Piezoelectric Tube Actuator.
OOKOSHI, Masahiro, SAKANO, SusumuVolume:
62
Year:
1996
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.62.1392
File:
PDF, 486 KB
1996