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Study on Nano-machining Process Using Mechanism of a Friction Force Microscope. 2nd Report. The Characteristics of Nano-Machining Process Using the Newly Developed FFM System.
ASHIDA, Kiwamu, MORITA, Noboru, YOSHIDA, YoshitaroVolume:
64
Year:
1998
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.64.4079
File:
PDF, 959 KB
1998