Mechanical and Optical Properties of DLC Films Prepared by...

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 2001 Vol. 67; Iss. 656

Mechanical and Optical Properties of DLC Films Prepared by DC-Magnetron Sputtering Using Sintered Diamond Target.

OHTAKE, Naoto, TAKAHASHI, Tohru, KATO, Kazunori
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Volume:
67
Year:
2001
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.67.1189
File:
PDF, 976 KB
2001
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