Grinding Performance of Thin-Plate Silica EPD Pellet to...

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 2002 Vol. 68; Iss. 673

Grinding Performance of Thin-Plate Silica EPD Pellet to Silicon Wafer.

SHIBUTANI, Hideo, FUKAZAWA, Takashi, FUWA, Naruto, IKENO, Jun-ichi, SUZUKI, Hirofumi, HORIUCHI, Osamu
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Volume:
68
Year:
2002
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.68.2791
File:
PDF, 860 KB
2002
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