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Simulation on Chemical Mechanical Polishing using Atomic Force Microscope
MIYOSHI, Atsushi, MATSUKAWA, Koei, MATSUO, Hiroshi, SAKAI, Tadayuki, NOZUE, MasaruVolume:
71
Year:
2005
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.71.280
File:
PDF, 3.37 MB
2005