Development of Abrasive-Free Polishing Method for Cu Utilizing Vacuum Ultra-Violet Light
KIRINO, Okiharu, ENOMOTO, ToshiyukiVolume:
74
Year:
2008
Language:
english
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.74.1656
File:
PDF, 1.31 MB
english, 2008