![](/img/cover-not-exists.png)
Vibration Suppression Control for a Pneumatic Isolation Table with Three Degrees-of-Freedom Using On-Off Valves
KOIKE, Masakazu, IIDA, Tomoharu, MARUYAMA, Naoto, CHIDA, Yuichi, IKEDA, YuichiVolume:
79
Year:
2013
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
DOI:
10.1299/kikaic.79.2438
File:
PDF, 2.14 MB
2013