Directional Selection Property of 2-Dimensional Complex...

Directional Selection Property of 2-Dimensional Complex Discrete Wavelet Transform and Its Application on Defect Inspection of Semiconductor Wafer Circuits

KATO, Takeshi, ZHANG, Zhong, TODA, Hiroshi, IMAMURA, Takashi, MIYAKE, Tetsuo
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Volume:
79
Year:
2013
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
DOI:
10.1299/kikaic.79.4901
File:
PDF, 2.31 MB
2013
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