Stabilization of MEMS accelerometer properties using...

Transactions of the JSME (in Japanese) 2016 Vol. 82; Iss. 840

Stabilization of MEMS accelerometer properties using stretchable beam structure

KAZAMA, Atsushi, AONO, Takanori, OKADA, Ryoji
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Volume:
82
Year:
2016
Language:
english
Journal:
Transactions of the JSME (in Japanese)
DOI:
10.1299/transjsme.16-00177
File:
PDF, 1.41 MB
english, 2016
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