Oil-lubricated friction characteristic of Si-containing hydrogenated carbon nitride films deposited by PECVD
KITAZUME, Kazutaka, KOUSAKA, Hiroyuki, TOKOROYAMA, Takayuki, UMEHARA, Noritsugu, FUWA, Yoshio, MANABE, KazuyoshiVolume:
80
Year:
2014
Language:
english
Journal:
Transactions of the JSME (in Japanese)
DOI:
10.1299/transjsme.2014trans0340
File:
PDF, 1.48 MB
english, 2014