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Effect of Additives on the Electrostatic Force of Alumina Electrostatic Chucks
WATANABE, Toshiya, KITABAYASHI, TetsuoVolume:
100
Year:
1992
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.100.1
File:
PDF, 1.50 MB
english, 1992