Etching of Zinc Oxide Films by Acetylacetone
NISHINO, Junichi, FURUSE, Shouichi, SATOH, Akiko, OHSHIO, Shigeo, KAMATA, KiichiroVolume:
103
Year:
1995
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.103.85
File:
PDF, 1.70 MB
1995