Etching of Zinc Oxide Films by Acetylacetone

Etching of Zinc Oxide Films by Acetylacetone

NISHINO, Junichi, FURUSE, Shouichi, SATOH, Akiko, OHSHIO, Shigeo, KAMATA, Kiichiro
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Volume:
103
Year:
1995
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.103.85
File:
PDF, 1.70 MB
1995
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