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Nanopore Structure of Sputtered Silica Thin Films Probed by Spectroscopic Ellipsometry and Variable-Energy Positron Annihilation
ITO, Kenji, YU, Runsheng, KOBAYASHI, Yoshinori, SATO, Kiminori, HIRATA, Kouichi, TOGASHI, Hisashi, MICHIDA, Yasuko, SUZUKI, Ryoichi, OHDAIRA, ToshiyukiVolume:
112
Year:
2004
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.112.338
File:
PDF, 628 KB
2004