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Synthesis of AlN Films by Chemical Vapor Deposition in AlCl3⋅NH3-H2 System
WATARI, Takanori, NARAKI, Eiji, TORIKAI, Toshio, MATSUDA, OhsakuVolume:
98
Year:
1990
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.98.1120
File:
PDF, 2.52 MB
1990