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Mechanical Properties of SiCx Films by Reactive Sputtering
KAMATA, Kiichiro, SAITO, Norio, HAYASHI, Noriyuki, TANABE, Isao, MORIYAMA, MinoruVolume:
98
Year:
1990
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj.98.156
File:
PDF, 1.04 MB
1990